![]() ![]() 229910052710 silicon Inorganic materials 0.000 claims description 10.230000000875 corresponding Effects 0.000 claims description 10.239000000758 substrate Substances 0.000 claims abstract description 76.Assignors: KAWAI, HIROSHI, OHWADA, KUNIKI Publication of US20010002551A1 publication Critical patent/US20010002551A1/en Application granted granted Critical Publication of US6430998B2 publication Critical patent/US6430998B2/en Anticipated expiration legal-status Critical Status Expired - Lifetime legal-status Critical Current Links ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). reassignment MURATA MANUFACTURING CO., LTD. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority to JP11-344648 priority Critical Priority to JP34464899A priority patent/JP2001082964A/en Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd Assigned to MURATA MANUFACTURING CO., LTD. Original Assignee Murata Manufacturing Co Ltd Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Hiroshi Kawai Kuniki Ohwada Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number US09/727,087 Other versions US6430998B2
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